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Surface chemical analysis. Information format for static secondary-ion mass spectrometry
Description
Surface chemical analysis. Information format for static secondary-ion mass spectrometry1 Scope This International Standard provides a digital format to store, and transfer between computers, in a compact way, important calibration and instrumental parameter data necessary to make effective use of spectral data files from static SIMS instruments. This format is designed to supplement the data transfer format specified in ISO 14976.
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Commission and the European Free Trade Association and within its scope the standard covers all
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