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Semiconductor devices. Micro-electromechanical devices - Micro-pillar compression test for MEMS materials

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Semiconductor devices. Micro-electromechanical devices - Micro-pillar compression test for MEMS materials1 Scope This part of IEC 62047 specifies micro pillar compression test method to measure compressive properties of MEMS materials with high accuracy, repeatability, and moderate effort of specimen fabrication. The uniaxial compressive stress strain relationship of a specimen is measured, and the compressive modulus of elasticity and yield strength can be obtained. The test piece is a cylindrical pillar fabricated on a rigid (or highly stiff) substrate

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