Surface chemical analysis. Secondary ion mass spectrometry. Correction method for saturated intensity in single ion counting dynamic secondary ion mass spectrometry1 Scope This document specifies a method for determining the maximum count rate for an acceptable limit of divergence from linearity of the intensity scale in pulse counting magnetic sector type secondary ion mass spectrometers or quadrupole secondary ion mass spectrometers. It uses a test based on depth profile analysis of two isotopes in a reference material which has a gradual concentration change between low and high concentration regimes. It also

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