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Carbon based films. Classification and designations
Description
Carbon based films. Classification and designations1 Scope This document specifies classification, designations and short names for carbon based films. These are films in which carbon is the predominant constituent part and which are deposited by physical vapour deposition (PVD) or chemical vapour deposition (CVD) process. This includes amorphous carbon based films, also called diamond like carbon films (DLC), as well as CVD diamond films, graphite and polymer like films. This document is applicable
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