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Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness
Description
Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thicknessWhat is this standard about? This document specifies several methods for measuring the oxide thickness at the surfaces of (100) and (111) silicon wafers as an equivalent thickness of silicon dioxide when measured using X ray photoelectron spectroscopy. It is only applicable to flat, polished samples and for instruments that incorporate an Al or Mg X ray source, a sample stage that permits defined photoelectron emission angles and a spectrometer with
Information on other disturbance phenomena is given in BS EN 61000-4-1:2001
Rules have been harmonized to align it with BS EN ISO 1101
Note: For the purposes of BS EN 14296
BS EN 15034:2006 Heating boilers
a) providing a framework to assist customers
Software engineers & developers
Manufacturers and suppliers of pipes and components
BS EN 14243-1 on materials obtained from end-of-life tyres is useful for:
The provisions of this document are applicable to medical devices that are intended for invasive or other direct or indirect patient contact
Extension of the scope to embedded rails
including percussion caps that are not specifically designed for toys
Selection of protection measures
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